JPH0431335B2 - - Google Patents

Info

Publication number
JPH0431335B2
JPH0431335B2 JP60295658A JP29565885A JPH0431335B2 JP H0431335 B2 JPH0431335 B2 JP H0431335B2 JP 60295658 A JP60295658 A JP 60295658A JP 29565885 A JP29565885 A JP 29565885A JP H0431335 B2 JPH0431335 B2 JP H0431335B2
Authority
JP
Japan
Prior art keywords
light
scale
optical
emitting element
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60295658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62150118A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP29565885A priority Critical patent/JPS62150118A/ja
Publication of JPS62150118A publication Critical patent/JPS62150118A/ja
Publication of JPH0431335B2 publication Critical patent/JPH0431335B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP29565885A 1985-12-25 1985-12-25 光学式変位検出装置 Granted JPS62150118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29565885A JPS62150118A (ja) 1985-12-25 1985-12-25 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29565885A JPS62150118A (ja) 1985-12-25 1985-12-25 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPS62150118A JPS62150118A (ja) 1987-07-04
JPH0431335B2 true JPH0431335B2 (en]) 1992-05-26

Family

ID=17823493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29565885A Granted JPS62150118A (ja) 1985-12-25 1985-12-25 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPS62150118A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617045Y2 (ja) * 1988-11-10 1994-05-02 株式会社ミツトヨ 光学式変位検出器
JPH03109123U (en]) * 1990-02-23 1991-11-08
JPH0536314U (ja) * 1990-12-25 1993-05-18 株式会社ミツトヨ 光学式測定装置
JP4485567B2 (ja) 2007-11-13 2010-06-23 シャープ株式会社 光角度検出装置、その製造方法、及びそれを用いた電子機器
JP5716358B2 (ja) * 2010-11-08 2015-05-13 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
JP7210103B2 (ja) * 2019-01-28 2023-01-23 株式会社ミツトヨ エンコーダの寿命検出装置
CN113406710A (zh) * 2020-03-17 2021-09-17 同方威视技术股份有限公司 探测器模块、探测器设备和检查设备

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263747A (en) * 1975-11-20 1977-05-26 Fujitsu Ltd Light detector for optical encoder
JPS6014287B2 (ja) * 1981-06-01 1985-04-12 株式会社 三豊製作所 光電型エンコ−ダのスケ−ル

Also Published As

Publication number Publication date
JPS62150118A (ja) 1987-07-04

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Legal Events

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